Outline* The shown information is the one as of the awarded date and might has been changed.
This Scanning Electron Microscopy (SEM) offers an easy environment in which anyone can obtain the satisfactory image. Due to an increase of the SEM’s market share, the demand of a high-resolution SEM for beginners is growing. On top of the basic technology, this new SEM includes a user-friendly manual that navigates the procedures from setting specimen to recording images and a UI that automatically sets the optimum condition from selected observation purpose. The focus and astigmatism correction that can be easily operated from this UI also ensures the quality of image.
Sukehiro Ito, Science & Medical Systems Design Division, Hitachi High-Technologies Corporation
Mitsugu Sato, Noriko Iizumi, Research and Development Division, Hitachi High-Technologies Corporation + Masaki Takano, Shotaro Tamayama, Design Division, Hitachi, Ltd.
Toru Ando,Mami Konomi,Tsutomu Saito,Kunji Shigeto,Masako Nishimura,Mitsugu Yamashita,Syunya Watanabe,Hitachi High-Technologies Corp.+Hiroyuki Nouda,Takahiro Inada,Yayoi Konishi,Naoko Ushio,Hitachi,Ltd
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