Outline* The shown information is the one as of the awarded date and might has been changed.
Minimal Fab is a totally new semiconductor production system to deal with production needs of multiple kinds in small quantities and variable kinds in variable quantities. The production unit is 0.5 inch wafer diameter, which covers the size of almost any device, and a device group has been developed with a shared body design and a width of about 30 cm compatible with the wafer size. A local cleaning technology, using a sealed conveyance container called Minimal Shuttle, has eliminated the need for a clean room. Thus, compared to a conventional Mega Fab requiring a large clean room, the amount of investment for production equipment can be reduced by 1/1,000. A main feature is the aim to realize global environmental measures and industrial enhancement at the same time.
Shiro Hara, Representative, Fab System Research Consortium,AIST(Advanced industrial Science and Technology)
Hiroshi Kato, Minimal Fab Development Association
Teshima Design Studio, Akira Teshima + Design Network Co., Ltd., Shinji Futagawa
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